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DELTA F CORPORATION
Technical Bulletin No. 1
M-Series Sensor
The M-Series oxygen sensor from Delta F Corporation
solves oxygen contamination issues in applications where other analytical
techniques fail. Processes across semiconductor, petrochemical and
air separation industries are continuing to demand more stringent
purity levels in process gases. Oxygen contaminant levels are trending
even lower, from parts-per-million levels down to even parts-per-billion
levels. Delta F answered the call for users in need of reliable
trace-level process oxygen analytical capability with the introduction
of the M-Series oxygen sensor. Three common applications where the
M-Series sensor is used to solve oxygen contamination issues are:
1. Semiconductor - Rapid
Thermal Processing
A combination of the high temperature environment in an RTP chamber
with even ppb oxygen levels in the gas phase creates ideal conditions
for undesirable oxidation reactions to occur on the surface of a
semiconductor wafer. Zirconia oxide oxygen analyzers have traditionally
been used in RTP applications to detect oxygen contamination and
monitor purge cycles because of their rapid speed of response and
wide dynamic range. Zirconia oxide analyzers, however, are not very
reliable for measuring oxygen at ppm concentrations due to their
susceptibility to giving false low readings in the presence of reducing
gases (such as H2, CO, NH3 and all hydrocarbons). Delta F's M-Series
sensor offers users the speed-of-response associated with zirconia
analyzers along with the immunity to reducing gas interference associated
with Delta F's proven non-depleting electrochemical oxygen sensing
technology.
2. Petrochemical - Olefins
Purity
It is critical to know the instant a high oxygen excursion occurs
in olefins purity applications. The presence of oxygen in a reactor
feed stream to a polymerization reactor can potentially accelerate
catalyst poisoning. Oxygen in the reactor feed stream can also broaden
molecular weight, composition distribution and tacticity of final
product. The typical tolerable oxygen contaminant level of olefins
streams is less than 100ppb. Galvanic/fuel-cell analyzers are prone
to give false low readings that can lead operators to believe the
oxygen contaminant level is below specification when high oxygen
levels can be causing poor product quality. Delta F's M-Series sensors
do not produce false low readings and can be relied upon to indicate
oxygen changes in seconds while offering 3ppb sensitivity.
3. Air Separation –
Cryogenic Fractional Distillation Product Purity
High purity air separation units (ASU's) that separate air via cryogenic
fractional distillation generally deliver separated gases from the
ASU over to customer's plant through a network of pipelines. The
oxygen content of high purity gases in this application varies,
less than 1ppm is typical. Low-end sensitivity, accuracy and reliability
are needed in these applications to ensure that product is being
separated to the specified purity requirements. Also, it is paramount
that cryogenic ASUs have an analyzer that responds instantaneously
to oxygen changes to protect the customer's pipeline from contamination,
which, if undetected, can contribute to reduced yields in the end-user's
process. Both Delta F non-depleting electrochemical and galvanic/fuel-cell
electrochemical analyzers are used in this application. The slower
response time, inferior sensitivity and low accuracy of galvanic/fuel-cell
electrochemical sensors are further reduced as the sensors age because
the anode is consumed in the measurement of oxygen and the electrolyte
in the sensor dries out over time. The M-Series sensor, like all
Delta F non-depleting electrochemical sensors, is not consumed in
the measurement of oxygen so it can be relied upon to provide reliable,
sensitive, accurate, fast measurement of oxygen endlessly.
Delta F's M-Series sensor has enabled users to accurately
monitor and maintain high purity gases in many applications in addition
to those detailed above. The M-Series sensor is only available in
high-resolution 0-50ppm ranges of both the DF-350 Platinum Series
Process Oxygen Analyzer and the DF-310 Oxygen Analyzer designed
with flexibility to suit a wide variety of application needs.
The M-Series sensor offers
several benefits in comparison to alternative oxygen sensing technologies:
- Increased Sensitivity...Designed to make accurate
and reliable measurements from 10ppb up to 50ppm, where changes
as small as 3ppb can be detected
- Instantaneous Speed-of-Response...It takes less
than 10 seconds to read 90% of a change in the O2 level of a sample
gas
- Improved Stability...No need for zero calibrations;
only annual span calibrations are recommended
- Better Accuracy...The greater of +/-10ppb or
+/-3% of reading
The M-Series 0-50ppm sensor can be purchased with
a V-Series option for faster recovery times in upset prone applications.
The V-Series option is specifically intended for tank/trailer filling
applications where upsets frequently occur. For applications where
acids and ionic impurities are present, the M-Series sensor can
also be purchased with the Stab-El™ option that is specifically
designed to neutralize trace contaminants including acids such as
CO2, H2S, CL2, NOx, and SOx.
Like all Delta F oxygen analyzers, all sensors are
backed by our 5-Year Sensor Warranty and are calibrated traceable
to NIST.
 
Delta F Oxygen Analyzers can be ordered with a full scale range
of 0-2 parts per billion (ppb) to as high as 0-25 percent.
For specific product recommendations, contact
Delta F Corporation
4 Constitution Way
Woburn, MA 01801-1087
Tel. (781)935-4600
FAX (781)938-0531
e-mail
marketing@delta-f.com.
BiStrataTM and STAB-ELTM are Trademarks of Delta F Corporation.
For more information, click here to view
the M-Series Sensor.pdf
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